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10.1117/12.2286323ISTPDai FZ, 2012, APPL OPTICS, V51, P5028, DOI 10.1364/AO.51.005028; Goldberg KA, 1997, EXTREME U INTERFEROM, P74; Kato S, 2005, P SOC PHOTO-OPT INS, V5751, P110, DOI 10.1117/12.600468; Li Jie, 2014, CHINESE J LASERS, V41; Ling T, 2014, APPL OPTICS, V53, P7144, DOI 10.1364/AO.53.007144; Miyakawa R, 2011, P SOC PHOTO-OPT INS, V7969; Miyakawa RH, 2011, WAVEFRONT METROLOGY, P447International Conference on Optical Instruments and Technology - Advanced Optical Sensors and Applications639400310618Proc.SPIE2017lateral shearing interferometry; wavefront reconstruction; Zernike polynomialSESE16169916181618A systematic error calibration method is presented to improve the measurement accuracy of lateral shearing interferometry (LSI). This method is used to remove the most significant errors: geometric optical path difference (OPD) and detector tilt error. Difference fronts in the 0 degrees and 90 degrees directions are used to reconstruct wavefront using difference Zernike polynomial fitting. And difference fronts in the 45 degrees and 135 degrees directions are also used to reconstruct wavefront. The coefficient differences between the reconstructed wavefront are generated from geometric OPD and detector tilt error. The relationship between Zernike coefficient differences and systematic parameters are presented based on shear matrix. Thus, the distance of diffracted light converging point (d) and detector tilt angle can be calculated from the coefficient difference. Based on the calculated d and detector tilt angle, the geometric OPD and detector-tilt induced systematic errors are removed and the measurement accuracy of LSI is improved.2017 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY ADVANCED OPTICAL SENSORS AND APPLICATIONSA method for improving the measurement accuracy of lateral shearing interferometry会议论文EnglishLi, Jie; Tang, Feng; Wang, Xiangzhao; Ba, Rongsheng; Zhou, Xinda; Zheng, Yinbo; Ding, Lei; Chen, Bo; Yang, Xiaoyu; Yuan, Jing42384106180P WOS:000426286100024
外文题目: A method for improving the measurement accuracy of lateral shearing interferometry
作者: Li, Jie; Tang, Feng; Wang, Xiangzhao; Ba, Rongsheng; Zhou, Xinda; Zheng, Yinbo; Ding, Lei; Chen, Bo; Yang, Xiaoyu; Yuan, Jing
刊名: Proc.SPIE
来源图书: 2017 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY ADVANCED OPTICAL SENSORS AND APPLICATIONS
年: 2017 卷: 10618 文章编号:106180P
会议名称: International Conference on Optical Instruments and Technology - Advanced Optical Sensors and Applications
英文关键词:
lateral shearing interferometry; wavefront reconstruction; Zernike polynomial
英文摘要:
文献类型: 会议论文
正文语种: English
收录类别: ISTP  
DOI: 10.1117/12.2286323
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