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10.1117/12.2317763ISTP[Anonymous], 1997, MILPRF13830B; Baisden PA, 2016, FUSION SCI TECHNOL, V69, P295, DOI 10.13182/FST15-143; Betti R, 2016, NAT PHYS, V12, P435, DOI [10.1038/nphys3736, 10.1038/NPHYS3736]; Chen J., 2014, Automatic balanced photodetector for photothermal detection, Patent No. [CN203643337U, 203643337]; Chen J, 2017, PROC SPIE, V10339, DOI 10.1117/12.2275972; Chen J, 2015, PROC SPIE, V9345, DOI 10.1117/12.2079085; Chen J, 2013, PROC SPIE, V8786, DOI 10.1117/12.2020455; Chow R, 2001, P SOC PHOTO-OPT INS, V4347, P62, DOI 10.1117/12.425027; Creath K., 2014, P SOC PHOTO-OPT INS, V9203; Dong JT, 2015, PROC SPIE, V9543, DOI 10.1117/12.2182237; Dong JT, 2015, PROC SPIE, V9346, DOI 10.1117/12.2079099; Exarhos G. J., 2016, P SOC PHOTO-OPT INS, V10014; Genin FY, 2001, J OPT SOC AM A, V18, P2607, DOI 10.1364/JOSAA.18.002607; Hu GH, 2012, OPT EXPRESS, V20, P25169, DOI 10.1364/OE.20.025169; Huang J., 2013, OPTICAL ENG, V52; ISO, 2009, ISO101107; ISO, 2011, 149972011 ISO; JACKSON WB, 1981, APPL OPTICS, V20, P1333, DOI 10.1364/AO.20.001333; KARNER C, 1985, APPL PHYS A-MATER, V38, P19, DOI 10.1007/BF00618721; Li B., 2016, A real-time imaging device based on photothermal detection and optical microscopy for optical material defect, Patent No. [CN205280608U, 205280608]; Li L, 2014, APPL OPTICS, V53, P5131, DOI 10.1364/AO.53.005131; Liu D, 2007, OPT COMMUN, V278, P240, DOI 10.1016/j.optcom.2007.06.041; Liu D, 2013, OPT EXPRESS, V21, P5974, DOI 10.1364/OE.21.005974; Moses EI, 2009, NUCL FUSION, V49, DOI 10.1088/0029-5515/49/10/104022; Ni Kai-zao, 2016, Optics and Precision Engineering, V24, P3020, DOI 10.3788/OPE.20162412.3020; OLMSTEAD MA, 1983, APPL PHYS A-MATER, V32, P141, DOI 10.1007/BF00616610; Sheehan L, 1996, P SOC PHOTO-OPT INS, V2775, P357, DOI 10.1117/12.246762; Spaeth ML, 2016, FUSION SCI TECHNOL, V69, P265, DOI 10.13182/FST15-119; Wang ST, 2014, OPT COMMUN, V312, P110, DOI 10.1016/j.optcom.2013.08.083; Wang YL, 2015, OPT EXPRESS, V23, P16273, DOI 10.1364/OE.23.016273; Wu ZL, 2015, PROC SPIE, V9543, DOI 10.1117/12.2182235; Wu ZL, 2001, APPL OPTICS, V40, P1897, DOI 10.1364/AO.40.001897328th Conference on Pacific-Rim Laser Damage (PLD) - Optical Materials for High-Power Lasers696546510713Proc.SPIE2018surface defects; laser damage; defect free; multi-mode metrologyPHOTOTHERMAL DISPLACEMENT SPECTROSCOPY; LARGE FINE OPTICS; DKDP CRYSTALS; SURFACE; COATINGS; MICROSCOPY; ABSORPTION; SILICA; SYSTEMSESE171799171317134In this paper, the concept of a mesoscopic method with high-speed and high-sensitivity is proposed for characterization of surface defects for large optics. The technology is a comprehensive integration of laser scattering method and highly sensitive photothermal method. The principle, experimental setup and preliminary measurement results are presented in detail in the paper. A statistical model for evaluation of mapping results of defects is also proposed to show the effectiveness of the comprehensive metrology method. The proposed method can detect non-destructively surface defects with high-speed and high-sensitivity at the mesoscopical level. It is a promising novel tool for mapping defects in meter size optics and hence it can provide clues to eliminate defects during the manufacturing processes and march toward "defect-free" optics.PACIFIC-RIM LASER DAMAGE 2018: OPTICAL MATERIALS FOR HIGH-POWER LASERSToward "defect-free" optics: a pioneering comprehensive metrology method会议论文EnglishShao, Jianda; Chen, Jian; Liu, Shijie; Zhao, Yuanan; Zhu, Meiping; Ni, Kaizao; Ma, Liang; Li, Wencai; Huang, Ming434851071304 WOS:000442114900002
外文题目: Toward "defect-free" optics: a pioneering comprehensive metrology method
作者: Shao, Jianda; Chen, Jian; Liu, Shijie; Zhao, Yuanan; Zhu, Meiping; Ni, Kaizao; Ma, Liang; Li, Wencai; Huang, Ming
刊名: Proc.SPIE
来源图书: PACIFIC-RIM LASER DAMAGE 2018: OPTICAL MATERIALS FOR HIGH-POWER LASERS
年: 2018 卷: 10713 文章编号:1071304
会议名称: 8th Conference on Pacific-Rim Laser Damage (PLD) - Optical Materials for High-Power Lasers
英文关键词:
surface defects; laser damage; defect free; multi-mode metrology
PHOTOTHERMAL DISPLACEMENT SPECTROSCOPY; LARGE FINE OPTICS; DKDP CRYSTALS; SURFACE; COATINGS; MICROSCOPY; ABSORPTION; SILICA; SYSTEM
英文摘要:
文献类型: 会议论文
正文语种: English
收录类别: ISTP  
DOI: 10.1117/12.2317763
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